Process Qualification Strategy for Advanced Embedded Non-volatile Memory Technology
نویسنده
چکیده
A qualification strategy for advanced embedded non-volatile memory technology has been revealed. This strategy consists of: thorough understanding of the requirements, extensive use and frequent update of the FMEA (failure mode effect analysis), a qualification plan with excellent coverage of all the iisk areas, implementing effective in-line and off-line measures and control, and check-off of all the tests with goad results. With such a strategy in place, the Philips’ 0.18ym embedded flash technology has been successfully qualified for volume production.
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